Ultra
Ultra pad series showcases advances in NexPlanar® polyurethane technology beyond what customers already experience with Element pads, targeting superior performance for customers’ needs in advanced nodes. Designed to offer our customers high throughput and low defectivity for a variety of targeted technology applications.
Ultra pads provides a wide range of tunable hardness, porosity and compressibility while preserving the low defect advantage of Element pads, breakthroughs in eliminating the trade-offs between high removal rate, planarization and low defectivity, and the ability to provide improved texture during use to drive higher removal rate and performance stability.