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Cabot Microelectronics Launches SiLECT Product Line

02/20/2003

STI Product Line Offers Industry's First Selective Deceleration Polishing Mechanism

"This unique 'selective deceleration' mechanism utilizes an innovative combination of high selectivity and controlled oxide removal rate designed to achieve optimal planarity and a faster, more precise surface clearing," said Steve Smith, Vice President of Marketing and Sales at Cabot Microelectronics Corporation. "The SiLECT(TM) technology is designed to enable even the most stringent 90nm direct STI performance requirements, including 300mm process technology."

Designed as a colloidally stable, user-ready slurry, the SiLECT(TM) product line has been developed to lead the market in manufacturability at customer facilities.

About Cabot Microelectronics Corporation

Cabot Microelectronics, headquartered in Aurora, Illinois, USA, is the world leader in the development and supply of high-performance polishing slurries used for chemical mechanical planarization (CMP), a process that enables the manufacture of the most advanced integrated circuit (IC) devices and hard disk drive components. The Company reported fiscal 2002 revenues of $235.2 million. For more information please visit the Cabot Microelectronics web site at www.cabotcmp.com or call 1-630-499-2600.

Safe Harbor Statement

The statements contained in this news release may contain "forward-looking statements." Actual results may differ materially from those anticipated in such forward-looking statements. All of these statements are expressly qualified in their entirety by the risk factors and other cautionary statements included in Cabot Microelectronics' filings with the Securities and Exchange Commission.

     Contact:
     Laura Vanderbilt
     Marketing Communications Manager
     Cabot Microelectronics Corporation
     630/375-5504

CONTACT:          Laura Vanderbilt, Marketing Communications Manager of Cabot
                  Microelectronics Corporation, +1-630-375-5504

URL:              http://www.cabotcmp.com 
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